| Customization: | Available |
|---|---|
| Certification: | ISO |
| Place Style: | Horizontal |
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The furnace is used for reaction sintering, low pressure sintering, re-crystal sintering of ceramic product, and it can also used for production of ceramic powder. It has both horizontal and vertical structures.
Application: Ceramic products such as SiC, silicon nitride and aluminum nitride.
Specifications of Vacuum Sintering Furnace
| ModelSpec |
Working Zone Size (W×H×L) (mm) |
Max. Temperature (°C) | Temperature Uniformity (°C) | Ultimate Vacuum (Pa) | Pressure Increase Rate (Pa/h) |
| HVSF-050511 | 500×500×1100 | 1500/2400 | ±5/±10 | 1-100 | 0.67 |
| HVSF-100612 | 1000×600×1200 | 1500/2400 | ±5/±10 | 1-100 | 0.67 |
| HVSF-100813 | 1000×800×1300 | 1500/2400 | ±5/±10 | 1-100 | 0.67 |
| HVSF-100825 | 1000×800×2500 | 1500/2400 | ±5/±10 | 1-100 | 0.67 |
| HVSF-100840 | 1000×800×4000 | 1500/2400 | ±5/±10 | 1-100 | 0.67 |
| VVSF-0612 | φ600×1200 | 1500/2400 | ±5/±10 | 1-100 | 0.67 |
| VVSF-0917 | φ900×1700 | 1500/2400 | ±5/±10 | 1-100 | 0.67 |
| VVSF-1015 | φ1000×1500 | 1500/2400 | ±5/±10 | 1-100 | 0.67 |
| VVSF-1120 | φ1100×2000 | 1500/2400 | ±5/±10 | 1-100 | 0.67 |
| The above parameters can be adjusted to the process requirements, they are not as acceptance standard, the detail spec. will be stated in the technical proposal and agreements. | |||||
1.Using unique ACME super high temperature and high current power supply technology, it can long term stable use at high temperature;
2.Using special designed high temperature pyro-meter measuring technology with precision temperature control and small deviation;
3.Installed with special sealing muffle to minimize the silicon vapor and exhaust gas contamination to the heating element and insulation;
4.Installed high efficiency exhaust gas treatment device , which is environment-friendly and convenient to clean;
5.It has debinding system, to complete debinding and sintering process in one furnace at one time.
1.Furnace door: screw/hydraulic/manual elevation; manual tight/auto lock-ring tight
2.Furnace vessel: all carbon steel/inner layer stainless steel/all stainless steel
3.Furnace hot zone: soft carbon felt/soft graphite felt/rigid composite board/CFC
4.Heating element and muffle: isostatic press graphite/high purity, strength and density graphite/fine size graphite
5.Process gas system: volume/mass flow-meter; manual/auto valve;
6.Thermocouple: C type/S type/R type/B type
7.Pyro-meter:Dual-color/Single color; CHINO/Raytek
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